Main contents

Micro- and Nanorobotics

Research posters

  1. Micro- and Nanorobotics, and Self-assembly pdf (2012)

Papers in International Journals and Conferences

  1. Routa, I, Chang, B., Shah, A. and Zhou, Q. "Surface Tension Driven Self-alignment of Microchips on Low-precision Receptors", IEEE Journal of Microelectromechanical Systems, to appear.
  2. Liimatainen, V., Sariola, V., Zhou, Q., "Controlling liquid spreading using microfabricated undercut edges", Advanced Materials, Vol. 25(16), pp. 2275–2278, 2013. (Frontispiece)
  3. Shah, A., Chang, B., Suihkonen S., Zhou, Q. and Lipsanen, H., “Surface-tension Driven Self-alignment of Microchips on Black Silicon Based Hybrid Template in Ambient Air”, IEEE Journal of Microelectromechanical Systems, 2013.
  4. Chang, B., Shah, A., Zhou, Q. “Experimental Investigation on Hybrid Microassembly of Microchips on Sharp Edged Patterns”, in Proceedings of the Third International Conference on Manipulation, Manu­facturing and Measurement on the Nanoscale, 3M-NANO, Suzhou, China, August 2013.
  5. Liimatainen, V., Kharboutly, M., Rostoucher, D., Gauthier, M., Zhou, Q., “Capillary self-alignment assisted hybrid robotic handling for ultra-thin die stacking”, in 2013 IEEE International Conference on Robotics and Automation, ICRA 2013, Karlsruhe, Germany on May 6 - 10, 2013.
  6. Liimatainen, V., Sariola, V., and Zhou, Q., “Undercut edges for robust capillary self-alignment in hybrid microassembly”, in the 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013.
  7. Chang, B., Shah, A., Routa, I., Lipsanen, H., and Zhou, Q., "Surface-tension driven self-assembly of microchips on hydrophobic receptor sites with water using forced wetting," Applied Physics Letters, Vol. 101, no. 11, 5 pp, 2012. PDF
  8. Römer, G.R.B.E., Arnaldo del Cerro, D., Pohl, R., Chang, B., Liimatainen, V., Zhou, Q. and Huis in 't Veld, A.J., “Picosecond Laser Machining of Metallic and Polymer Substrates for Fluidic Driven Self-Alignment”, Physics procedia, 39, 628 – 635, 2012.
  9. Romer, G.R.B.E., Arnaldo del Cerro, D., Jorritsma, M.M.J., Pohl, R., Chang, B., Liimatainen, V., Zhou, Q. and Huis in 't Veld, A.J. “Laser micro-machining of sharp edged receptor sites in pulyimide for fluid driven self-alignment”, Proceedings of 13th International Symposium on Laser Precision Microfabrication, LPM 2012, June 12-15, 2012, Washington, USA, 2012.
  10. Virta, A., Timonen, J., Ras, R., Zhou, Q., “Force Sensing Using Artificial Magnetic Cilia”, in Proceedings of 2012 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2012, October 7-12, 2012, Vilamoura, Algarve, Portugal, 6pp., 2012.
  11. Chang, B., Virta, A., and Zhou, Q., "Hybrid microassembly for massively parallel assembly of microchips with water mist," in the Second International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, Xi'an, China, 2012, 6 pp.
  12. Römer, G.R.B.E., Arnaldo del Cerro, D., Pohl, R., Chang, B., Liimatainen, V., Zhou, Q., Huis in 't Veld, B., “Picosecond laser machining of metallic and polymer substrates for fluidic driven self-alignment”, Proceedings of 7th International Conference on Photonic Technologies, LANE 2012, Furth, Germany, Nov. 12-15, 2012.
  13. Sariola, V., Liimatainen, V. and Zhou, Q. "Fusion of robotics and capillary self-assembly for desktop manufacturing pdf", in Proceedings of 8th International Workshop on Micro Factories IWMF 2012, Tampere, Finland, 2012, 7 pp.
  14. Chang, B., Liimatainen, V., Routa, I. and Zhou, Q., "High-accuracy positioning of microchips on patterns with jagged edges using hybrid microassembly," in Proceedings of 2012 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2012, Chengdu, China, 2012, 6 pp.
  15. Chang, B., Routa, I., Sariola, V. and Zhou, Q., "Self-alignment of RFID dies on 4-pad patterns with water droplet for sparse self-assembly", Journal of Micromechanics and Microengineering, 21 095024, 2011.
  16. Chang, B., Sariola, V., Aura, S., Ras, R.H.A., Klonner, M., Lipsanen, H., and Zhou, Q., "Capillary-driven self-assembly of microchips on oleophilic/oleophobic patterned surface using adhesive droplet in ambient air", Applied Physics Letters, vol 99, 034104, 2011. PDF
  17. Chang, B., Sariola, V., Jääskeläinen, M., and Zhou, Q., "Self-alignment in the stacking of microchips with mist-induced water droplets", Journal of Micromechanics and Microengineering, vol. 21, 015016, 2011.
  18. Chang, B., Jääskeläinen, M., and Zhou, Q., "Hybrid Microassembly of Chips on Low Precision Patterns Assisted by Capillary Self-alignment", Proceedings of 2011 IEEE International Conference on Intelligent Robots and Systems, IROS 2011, San Francisco, USA, 2011, invited.
  19. Sariola, V., Liimatainen, V., Tolonen, T., Udd, R., and Zhou, Q., "Silicon Capillary Gripper With Self-alignment Capability", Proceedings of 2011 IEEE International Conference on Robotics and Automation, ICRA 2011, Shanghai, China, 2011.
  20. Sariola, V., Jääskeläinen, M., and Zhou, Q., “Hybrid microassembly combining robotics and water droplet self-alignment”, IEEE Transaction on Robotics, Vol. 26, Issue 6, pp. 965 - 977, 2010.
  21. Zhou, Q. and Sariola, V., “Unified view of robotic microhandling and self-assembly”, in Robotic Microassembly, M. Gauthier and S. Regnier ed., pp. 109-144, IEEE Press, 2010.
  22. Chang, B., Jääskeläinen, M., and Zhou, Q., “Microassembly combining pick-and-place and water mist”, Proceedings of 2010 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2010, Nagoya, Japan, 2010.
  23. Savia, M. and Zhou, Q., “Van der Waals Force Computation of Freely Oriented Rough Surfaces for Micromanipulation Purposes”, Proceedings of 2010 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2010, Taipei, Taiwan, 2010.
  24. Chang, B., Jääskeläinen, M., and Zhou, Q., “Hybrid Micro Assembly of Microchips on Segmented Patterns”, Proceedings of 6th IEEE Conference on Automation Science and Engineering, CASE 2010 Toronto, Canada, 2010.
  25. Zhou, Q., Sariola, V., and Chang, B., “Towards Hybrid Assembly of RFIDs”, Proceedings of Smart Systems Integration 2010, SSI 2010, Como, Italy, 2010.
  26. Jääskeläinen, M., Sariola, V., and Zhou, Q., “Environmental effects on droplet self-alignment based hybrid microassembly”, Proceedings of 2009 IEEE International Symposium on Assembly and Manufacturing, ISAM 2009, pp. 177 – 182, Suwon, Korea, 2009.
  27. Sariola, V., Zhou, Q., Koivo, H.N., “Three Dimensional Hybrid Microassembly Combining Robotic Microhandling and Self-Assembly”, Proceedings of 2009 IEEE International Conference on Robotics and Automation, ICRA 2009, pp. 2593-2598, Kobe, Japan, 2009.
  28. Lambert, P. and Zhou, Q. “Fluidic Assembly and Capillary Forces: modelling, experiments and case studies”, Proceedings of Smart Systems Integration, SSI 2009, Brussels, Belgium, 2009.
  29. Zhang, P.F. and Zhou, Q., “Voice Coil Based Hopping Mechanism for Microrobot”, Proceedings of 2009 IEEE International Conference on Robotics and Automation, ICRA 2009, pp. 1783-1788, Kobe, Japan, 2009.
  30. Savia, M. and Koivo, H.N., "Contact micromanipulation - Survey of strategies" IEEE/ASME Transactions on Mechatronics, Vol. 14, no. 4, pp. 504-514, 2009.
  31. Sariola, V., Zhou, Q. and Koivo, H.N. “Hybrid microhandling: a unified view of robotic handling and self-assembly”, Journal of Micro-Nano Mechatronics, Vol. 4, No. 1-2, pp. 5-16, 2008.
  32. Zhou, Q., and Fatikow, S., “Special Issue on automation in micro- and nanohandling”, Journal of Micro- and Nanomechatronics, Vol. 4, No. 1-2, pp. 3-4, 2008.
  33. Hänninen, P., Liimatainen, V., Sariola, V., Zhou, Q., and Koivo, H.N., “Swallowable Biotelemetry Device for Analysis of Irritable Bowel Syndrome”, Proceedings of 2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS’08, pp. 513 – 518, Nagoya, Japan, 2008.
  34. Zhou, Q. and Sariola, V., “Automation Software Architectures for Robotic Microhandling”, Proceedings of 6th International Workshop on Microfactory, IWMF 2008, USA, 2008.
  35. Sariola, V., Zhou, Q., Lass, R., Koivo, H.N., “Experimental study on droplet based hybrid microhandling using high speed camera”, Proceedings of 2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS’2008, pp. 919 – 924, Nice, France, 2008.
  36. Zhou, Q., “Strategies in Automatic Microhandling”, 2007 IEEE International Conference on Mechatronics and Automation, ICMA’2007, Haerbin, China, August 05-09, 2007, pp. 69-75, 2007.
  37. Hänninen, P., Zhou, Q., Koivo, H.N., “Neural Network Based Modeling of a Piezodisk Dynamics”, 2007 IEEE International Symposium on Computational Intelligence in Robotics and Automation, CIRA 2007, pp. 266 – 271, Jacksonville, Florida, USA, June 20-23, 2007.
  38. Hänninen, P. Sariola, V. Korhonen, P. Koivo, H. “Gastrointestinal biotelemetry device for detecting bowel motility”. Proceedings of the Smart Systems 2007 Conference, Finland. 2007.
  39. Chang, B., Zhou, Q., Wang, J., Koivo., K.N., “Capillary forces modeling in micro/nano interactions”, Proceedings of MNC2007, MicroNanoChina07, Sanya, Hainan, China, pp. 1005-1016, January 10-13, 2007.
  40. Zhou, Q., Korhonen, P., Laitinen, J., Sjövall, S. “Automatic dextrous microhandling based on a 6 DOF microgripper”, Journal of Micromechatronics, Vol. 3, No. 3-4, pp. 359-387, 2006. MicroNanoRobotics//JuM2006.Final.pdf pdf
  41. Zhou, Q., Chang, B., Koivo, H.N., “Temperature and Humidity Effects on Micro/nano Handling”, Materials Science Forum, Vols. 532-533, pp. 681-684, 2006.
  42. Savia, M., Koivo, H.N., Zhou, Q., “Evaluation of adhesion forces between arbitrary objects”, Journal of Micromechatronics, Vol. 3, No. 3-4, pp. 221-238, 2006.
  43. Zhou, Q., “More Confident Microhandling”, 5th International Workshop on Microfactory, IWMF’2006, Besancon, France, October 25-27, 2006.
  44. Zhou, Q., Chang, B., “Microhandling using robotic manipulation and capillary self-alignment”, 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS’2006, October 10-13, Beijing, pp. 5883-5888, 2006.
  45. Sjövall, S., Laitinen, J., Korhonen, P., Sariola, V., Zhou, Q., “Positioning and quality inspection of micro components using machine vision and 6DOF micro handling system”, 6th International Conference on Machine Automation, IMCA'2006, Seinöjoki, Finland, June 7-8, 2006.
  46. Zhou, Q., Korhonen, P., Chang, B., Sariola, V., “6 DOF dextrous microhandling system for inspection of microparts”, Proceeding of 2005 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM'05, pp. 534-539, Montery, USA, July 24-26, 2005.
  47. Korhonen, P., Zhou, Q., Laittinen, J., Sjövall, S., “Automatic dextrous handling of micro components using a 6 DOF microgripper”, Proceedings of 6th IEEE International Symposium on Computational Intelligence in Robotics and Automation, CIRA'05, pp. 125-131, Espoo, Finland, June 27-30, 2005.
  48. Zhou, Q., Aurelian, A., Chang, B., del Corral, C., Koivo, H.N., “Microassembly System with Controlled Environment”, Journal of Micromechatronics, 2004, Vol. 2, Issue 3, pp. 227-248, 2004.
  49. Zhou, Q., Chang, B., Koivo, H.N., “Ambient Environmental Effects in Micro/Nano Handling”, Proceedings of the 4th International Workshop on Microfactories, IWMF'04, Shanghai, China, pp. 146-151, October 15-17, 2004.
  50. Savia, M., Zhou, Q., Koivo, H.N., “Simulating Adhesion Forces Between Arbitrarily Shaped Objects in Micro/Nano-Handling Operations”, Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'04, Sendai, Japan, pp. 1722-1727, September 28 - October 2, 2004.
  51. Tuomikoski, S., del Corral, C., Zhou, Q., and Franssila, S., “SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot”, Proceedings of the 14th Micromechanic Workshop, MME3, Delft, Netherlands, November 2-4, 2003.
  52. Chang, B., Zhou, Q., Koivo, H. N., “Experimental Study of Microforces in a Controlled Environment”, Proceedings of 2nd VDE World Microtechnologies Congress, MICRO.tec 2003, Munich, Germany, pp. 89-94, October 13-15, 2003.
  53. del Corral, C., Zhou, Q., Albut, A., Chang, B, Franssila, S., Tuomikoski, S., Koivo, H.N. “Droplet Based Self-Assembly of SU-8 Microparts”, Proceedings of 2nd VDE World Microtechnologies Congress, MICRO.tec 2003, Munich, Germany, pp. 293-298, October 13-15, 2003.
  54. Ronkanen, P., Kallio, P., Zhou, Q., Koivo, H. N., “Current Control of Piezoelectric Actuators with Environmental Compensation”, Proceedings of 2nd VDE World Microtechnologies Congress, MICRO.tec 2003, Munich, Germany, pp. 323-328, October 13-15, 2003.
  55. Albut, A., Zhou, Q., del Corral, C., Koivo, H. N., “Development of Flexible Force-Controlled Piezo-Bimorph Microgripping System”, Proceedings of 2nd VDE World Microtechnologies Congress, MICRO.tec 2003, Munich, Germany, pp. 507-512, October 13-15, 2003.
  56. Zhou, Q., del Corral. C., Esteban, P.J., Albut, A. and Koivo, H.N. “Environmental Influences on Microassembly”, Proceedings of the 2002 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS’02, EPFL, Lausanne, Switzerland, October 2002, pp. 1760 - 1765, 2002.
  57. Zhou, Q., Albut, A. del Corral. C, and Koivo, H.N. “Environment Controlled Microassembly System”, Proceedings of the 3rd International Workshop on Microfactories, Minneappolis, MN, USA, September 16-18, 2002, pp. 13-16, 2002.
  58. del Corral, C., Esteban, P.J., Albut, A., Zhou, Q. and Koivo. H.N. “Influences of Environment Conditions on Microassembly Components and Pick-and-Place Operations”, Proceedings of the 4th International Conference on Machine Automation, Tampere, Finland, September 11-13, 2002, pp. 267-274, 2002.
  59. Zhou, Q., Albut, A., del Corral, C., Esteban, P.J., Kallio, P., Chang, B., Koivo, H.N., “A Microassembly Station with Controlled Environment”, Microrobotics and Microassembly III, Bradley J. Nelson, Jean-Marc Breguet, Editors, Proceedings of SPIE Vol. 4568, Boston, USA, October 2001, pp. 252 - 260, 2001.
  60. Zhou, Q., Kallio, P. and Koivo, H. N. “Developing Future Electronic Microassembly Systems: Model-based Object Handling and Assembly Planning in Microassembly”, Proceedings of the Annual Conference of ICIMS-NOE, ASI'2000, pp. 378-383, Bordeaux, France, Sept. 18-20, 2000.
  61. Zhou, Q., Kallio, P. and Koivo, H. N. “Virtual Environment for Operations in the Microworld”, Microrobotics and Microassembly II, Proceedings of SPIE, Bradley J. Nelson and Jean-Marc Breguet, Editors, Volume 4194, Boston USA, November 2000, 56 - 64, 2000.
  62. Kallio, P., Zhou, Q. and Koivo, H. N. “Three-Dimensional Position Control of a Parallel Micromanipulator using Visual Servoing”, Microrobotics and Microassembly II, Proceedings of SPIE, Bradley J. Nelson and Jean-Marc Breguet, Editors, Volume 4194, Boston USA, November 2000, pp. 103 - 111, 2000.
  63. Zhou, Q., Kallio, P. and Koivo, H. N. “Model-Based Handling and Planning in Micro Assembly”, Proceedings of the 2nd International Workshop on Microfactories, IWMF'2000, Fribourg, Switzerland, pp. 13-16, October 2000, 71 - 74.
  64. Zhou, Q., Kallio, P. Arai, F., Fukuda, T. and Koivo, H. N. “A Model for Operating Spherical Micro Objects”. Proceedings of the 1999 IEEE International Symposium on Micromechatronics and Human Science, MHS'99, pp. 79 - 85, November 24-26, 1999.
  65. Zhou, Q., Kallio, P. and Koivo, H. N., “Modeling of Micro Operations for Virtual Micromanipulation”, Microrobotics and Microassembly, Proceedings of SPIE, Bradley J. Nelson and Jean-Marc Breguet, Editors, Vol. 3834, pp. 195 - 202, Boston, USA, September 1999.
  66. Zhou, Q., Kallio, P. and Koivo, H. N. “Nonlinear System Identification of a Micromanipulator”. Proceedings of 1999 International Conference on Recent Advances in Mechatronics, ICRAM'99, Istanbul, Turkey, May 1999, pp. 467 - 472, 1999.
  67. Zhou, Q., Kallio, P. and Koivo, H. N. “Modelling of Piezohydraulic Actuator for Control of a Parallel Micromanipulator”. Proceedings of 1999 IEEE International Conference on Robotics and Automation, ICRA'99, The Westin Hotel Renaissance Center, Detroit, Michigan, USA, May 10-15, 1999, pp. 2750 - 2755, 1999.
  68. Kallio, P., Zhou, Q. and Koivo, H. N. “Control Issues in Micromanipulation”, Proceedings of the 1998 IEEE International Symposium on Micromechatronics and Human Science, MHS'98, Nagoya Congress Center, November 25-28, 1998, pp. 135 - 141, 1998.
  69. Kallio, P., Zhou, Q., Lind, M. and Koivo, H. N. “Position Control of A 3 DOF Piezohydraulic Parallel Micromanipulator”, Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'98, Victoria Conference Center, Victoria B. C., Canada, October 1998, pp. 770 - 775, 1998.
  70. Kallio, P., Lind, M., Zhou, Q. and Koivo, H.N. “Hall sensor Based Position Measurement System for a Parallel Micromanipulator”, Proceedings of 2nd Tampere International Conference On Machine Automation, ICMA'98, Tampere, Finland, September 1998, pp. 703 - 717, 1998.
  71. Zhou, Q., Kallio, P., Lind, M. and Koivo, H. N. “A Real-time Control Software Architecture for Microtelemanipulator Systems”, Proceedings of 2nd Tampere International Conference On Machine Automation, ICMA'98, Tampere, Finland, September 1998, pp. 681 - 690, 1998.
  72. Kallio, P., Lind, M., Zhou, Q. and Koivo, H. N. “A 3 DOF Piezohydraulic Parallel Micromanipulator”, Proceedings of IEEE International Conference on Robotics and Automation, ICRA'98, Leuven, Belgium, May 1998, pp. 1823 - 1828, 1998.
  73. Kallio, P., Lind, M., Zhou, Q. and Koivo, H. N. 1997. “A Parallel Piezohydraulic Micromanipulator - Mechatronics Aspects”, Proceedings of Euroconference Control & Configuration Aspects of Mechatronics, CCAM, Technical University of Ilmenau, Germany, September 1997.
  74. Kallio, P., Lind, M., Kojola, H., Zhou, Q. and Koivo H. N. 1996. “An Actuation System for Parallel Link Micromanipulators”, Proceedings of IEEE International Conference on Intelligent Robots and Systems, IROS'96, Osaka, Japan, November 1996, 856 - 862.
  75. Zhou, Q., Kallio, P. and Koivo, H. N. 1996. “Fuzzy Control System for Microtelemanipulation”, Proceedings of Second World Automation Congress, WAC'96, Montpellier, France, May 1996, Vol. 4, 817 - 822.

Other Scientific Publications

  1. Zhou, Q., "Three dimensional hybrid microassembly combining robotic microhandling and self-assembly", in 2011 IEEE ICRA Workshop: MEMS assembly and packaging: trends and challenges for robotics in the microscale May 9th, 2011, Shangai, China.
  2. Zhou, Q., "Impact of Ambient Environment on Micro Interactions", Invited paper in 2011 IEEE ICRA Tutorial: Dynamics, characterization and control at the micro/nano scale, May 14th, 2011, Shangai, China.
  3. Zhou, Q., "Microsystems Integration Using Robotics and Self-Assembly", Proceedings of Automaatio XIX Seminar, 15-16 May, 2011, Helsinki, Finland.
  4. Zhou, Q., Sariola, V., Koivo, H.N., “Microhandling strategies for automation”, Invited paper in 2007 IEEE IROS Workshop: Robotic Microassembly of Hybrid MEMS, November 2, 2007, CD proceeding, 10 pp, San Diego, CA, USA, 2007.
  5. Sariola, V. Korhonen, P. Hänninen, P. Koivo, H. Kallio, P. Ronkanen, P. Savia, M. "Microrobotic activities in Finland" Proceedings of IEEE/RAS - EURON Joint Workshop on Micro and Nano Robotics. Paris, France. 2006. Online, available: http://iarp06.robot.jussieu.fr/proceedings.html
  6. Kallio, P., Lind, M., Zhou, Q., Alavalkama, I. & Koivo, H.N., 1998. "Video Demonstration of a 3 DOF Piezohydraulic Parallel Micromanipulator", IEEE International Conference on Robotics and Automation, ICRA'98, Leuven, Belgium, May 1998.

Patents

  1. Kallio, P., Zhou, Q., Novotný, M., Koivo, H.N., Kuncova, J., Ronkanen, P. & Turunen J. ”Micromanipulator Including Piezoelectric Benders”, US Patent 7141914.