Main contents

Microfluidics Publications

  1. Albers, W., Lekkala, J., 2000. Development of EMFi-based Microfluidic Components. Loppuraportti.
  2. Kallio, P., Korpinen, J. and Koivo H. N, 2000. Three Dimensional Position Control of a Parallel Micromanipulator Using Visual Servoing. SPIE International Symposium on Intelligent Systems for Advanced Manufacturing Proceedings of Microrobotics and Microassembly, Boston, USA, November 2000.
  3. Kallio, P., Zhou, Q. and Koivo, H. N., 1998. Control Issues in Micromanipulation. International Symposium on Micromechatronics and Human Science, MHS'98, Nagoya, Japan, November 1998.
  4. Kallio, P., Zhou, Q., Lind, M. and Koivo, H. N., 1998. Position Control of A 3 DOF Piezohydraulic Parallel Micromanipulator. International Conference on Intelligent Robots and Systems, IROS'98, Victoria B. C., Canada, October 1998.
  5. Kallio, P., Zhou, Q., Lind, M. and Koivo, H. N., 1998. Hall Sensor Based Position Measurement System for a Parallel Micromanipulator. 2nd International Conference on Machine Automation, ICMA'98, Tampere, Finland, September 1998.
  6. Korpinen, J., Kallio, P. and Viitanen, J., 2000 Real Time Machine Vision System in Micromanipulator Control. International Conference on Machine Automation, ICMA'200, Osaka, Japan, September 2000.
  7. Kruusing, A. Uusimäki, S. Leppävuori, H. Moilanen, 1998. Micropump with dynamic valve in actuator membrane. In book: 43. Internationales Wissenschaftliches Kolloquium, TU Ilmenau, Thüringen, 21 - 24.09.1998, Bd. 2, S. 359-364.
  8. A. Kruusing, S. Leppävuori, A. Uusimäki, M. Uusimäki, 1998 Mask-defined abrasive-jet micromachining. In book: H. Reichl, E. Obermeier (eds.) MICRO SYSTEM Technologies 98, 6th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, December 1-3, 1998, VDE-Verlag GmbH, Berlin, Offenbach p. 673-5 [ISBN 3-8007-2421-9].
  9. A. Kruusing, S. Leppävuori, A. Uusimäki, M. Uusimäki, 1999. Rapid prototyping of silicon structures by aid of laser and abrasive-jet machining. Design, Test, and Microfabrication of MEMS and MOEMS, 30 March - 1 April 1999, Paris, France; Proceedings of the SPIE - The International Society for Optical Engineering, vol. 3680, Part 2, 1999, p. 870-878.
  10. A. Kruusing, S. Leppävuori, A. Uusimäki, 1999. Baltic-Nordic cooperation of Tallinn Technical University and University of Oulu in the field of micromechanical systems research. V. Snitka (ed.), Proceedings of VIth NEXUSPAN Workshop Microsystems Technology Activities in Baltic Region, 23-24 April 1999, Vilnius, Lithuania. Kaunas, "Technologija", 1999, p. 92-95.
  11. Lekkala J. & Paajanen M. (1999) EMFi - New Electret Material for Sensor and Actuators. Paper presented at ISE10 22 - 24.9.99 Delphi, Greece.
  12. S. Leppävuori, A. Kruusing, 1998. Piezoelectric microactuators and pumps. Proceedings of the 5-th Conference Optoelectronic and Electronic Sensors COE'98, May 10-13, 1998, Jurata, Poland, p. 23-28.
  13. S. Leppävuori, H. Moilanen, A. Kruusing, 1999. Preparation and applications of printed thick PZT films on different substrates. Proceedings of 12th European Microelectronics & Packaging Conference, Harrogate, Yorkshire, England 7 - 9 June 1999. International Microelectronics & Packaging Society-Europe, 1999, p. 48-54. [ISBN 0-9535858-0-8].
  14. Paajanen M., Lekkala J. & Kirjavainen K. (1999) ElectroMechanical Film (EMFi) - a new multipurpose electret material. Sensors & Actuators A, Accepted.
  15. Paajanen M., Välimäki, H. & Lekkala J. (1999) Modelling the sensor and actuator operations of the electromechanical Film EMFi. Paper presented at ISE10 22 - 24.9.99 Delphi, Greece.
  16. Peltonen J., Paajanen M. & Lekkala J. (1999) SPM characterization of electromechanical polypropylene films. Journal of Applied Physics, Submitted.
  17. Zhou, Q., Kallio, P. and Koivo, H. N., 1999. Nonlinear System Identification of a Micromanipulator. 1999 International Conference on Recent Advances in Mechatronics, ICRAM'99, Istanbul, Turkey, May 1999.
  18. Zhou, Q., Kallio, P. and Koivo, H. N., 1999. Modelling of Piezohydraulic Actuator for Control of a Parallel Micromanipulator. 1999 IEEE International Conference on Robotics and Automation, ICRA'99, Detroit, Michigan, USA, May 1999.


  1. Lehtonen, Tuomo, 1999. Liquid handling with two actuators in series. Projektiraportti. 9 s.
  2. Lehtonen, Tuomo, 1999. Kapillaariputken huuhtelusimulaatio. Projektiraportti. 15 s.
  3. Riikonen, Sampsa, 2000. Diffuusoripumppu ja hajautetut mikrofluidistiset mallit. Projektiraportti. 30 s.

Theses and dissertations

  1. Kallio, Pasi. Position Control of a Piezohydraulic Parallel Micromanipulator. Lisensiaattityö. Valmisteilla.
  2. Lehtonen, Tuomo, 1999. Mikrofluidistiikan ilmiöt, komponentit ja simulointi. Diplomityö. Teknillinen korkeakoulu, Automaatio- ja systeemitekniikan osasto. 93 s.
  3. Robyr, Sebastien, 1999. FEM modeling of a bellows and a bellows-based micromanipulator. Diplomityö. Teknillinen korkeakoulu, Automaatio- ja systeemitekniikan osasto. 55 s. </TD> </TR>